Symposium F5. Nanofabrication, Nanodevices, NEMS/MEMS and Sensor Technology
Organizers:
| Prof. Fan-Gang Tseng | National Tsing Hua University, Taiwan |
| Prof. Sheng-Wei Lee | National Central University, Taiwan |
| Prof. Pei-Wen Li | National Chiao Tung University, Taiwan |
| Prof. Motofumi Suzuki | Kyoto University, Japan |
Scope:
A variety of devices at nanometer scale/molecular scale for electronic, optoelectronic, sensing, thermoelectric, piezoelectric, biological and mechanical applications have been created through a rapid development of materials and fabrication technology. Further development of such devices or sensors strongly depends on the state-of-the-art knowledge of science and fabrication technology at nanoscale or on Nano/Micro-Electro-Mechanical Systems (NEMS/MEMS). This symposium aims at providing an interdisciplinary forum for presentation, discussion and review of the latest advance in nanodevices and nanofabrication, MEMS and sensor technology. Physics and chemistry in nanofabrication processes and their modelings are also in our scope. It intends to promote communication and collaboration among scientists involved in basic, applied, theoretic, or new conceptual research of the areas.
Topics:
- Fabrication, characterization, and modeling of nanodevices for (but not limited to) electronic, optoelectronic, sensing, thermoelectric, magnetic, piezoelectric, biological, and mechanical applications.
- Nanofabrication technologies such as scanning probe techniques, self-assembly techniques, selective etching/deposition, electron/ion beam technologies, and advanced photolithograph.
- Technologies for fabrication, material design, and characterization of Micro/Nano-Electro-Mechanical Systems (NEMS/MEMS) which include micro-sensors, microactuators, optical devices, RF devices, etc. Materials, integration and packaging techniques are also welcome.
- Chemical sensors and biosensors: Materials, devices, and their related reliability
Keynote Speakers & Invited Speakers (tentative):
| 1. Prof. Motofumi Suzuki | Kyoto University, Japan |
| 2. Dr. Thomas George | SaraniaSat Inc., USA |
| 3. Prof. Masato Sone | Tokyo Institute of Technology, Japan |
| 4. Prof. Chao-Sung Lai | Chang Gung university, Taiwan |
| 5. Prof. Daisuke Yamane | Tokyo Institute of Technology, Japan |
| 6. Prof. Pei-Kuen Wei | Acamedia Sinica, Taiwan |
| 7. Prof. Da-Jeng Yao | National Tsing Hua University, Taiwan |
| 8. Prof. Chih-Ting Lin | National Taiwan University, Taiwan |
| 9. Prof. Chia-Wen Tsao | National Central University, Taiwan |
| 10. Prof. Ping-Hung Yeh | Tamkang University, Taiwan |
| 11. Prof. Yit-Tsong Chen | National Taiwan University, Taiwan |